Coventor SEMulator3D 11.3: Virtual Fabrication Platform for 3D Process Modeling

SEMulator3D 11.3 is the latest release of Coventor’s virtual fabrication platform, which is a specialized 3D process modeling tool used for semiconductor and MEMS development. The software enables engineers to create a virtual equivalent of a full manufacturing process flow, predicting how complex 3D structures will form before any physical wafers are processed .

Core Capabilities

Full-Process Virtual Fabrication

Unlike traditional TCAD tools that model individual steps in isolation, SEMulator3D simulates the complete front-end fabrication sequence from start to finish . This allows it to predict downstream ramifications of process changes that would otherwise require expensive build-and-test cycles in the fab .

Voxel-Based Modeling Engine

The platform uses a physics-driven voxel (3D pixel) modeling approach where each voxel contains material information. Throughout the process steps, voxels are added (deposition), modified (implant), or deleted (etch), creating highly accurate 3D structural models .

Applications & Industry Use

SEMulator3D is deployed by leading semiconductor companies for advanced logic nodes (22nm, 14nm, 10nm and beyond), memory technologies including 3D NAND and DRAM, and MEMS device development . It is used for:

• Process development and integration

• Design rule development

• Failure analysis and metrology

• Virtual experimentation (DOE) and sensitivity analysis

Coventor SEMulator3D 11.3: Virtual Fabrication Platform for 3D Process Modeling

SEMulator3D 11.3 is the latest release of Coventor’s virtual fabrication platform, which is a specialized 3D process modeling tool used for semiconductor and MEMS development. The software enables engineers to create a virtual equivalent of a full manufacturing process flow, predicting how complex 3D structures will form before any physical wafers are processed .

Core Capabilities

Full-Process Virtual Fabrication

Unlike traditional TCAD tools that model individual steps in isolation, SEMulator3D simulates the complete front-end fabrication sequence from start to finish . This allows it to predict downstream ramifications of process changes that would otherwise require expensive build-and-test cycles in the fab .

Voxel-Based Modeling Engine

The platform uses a physics-driven voxel (3D pixel) modeling approach where each voxel contains material information. Throughout the process steps, voxels are added (deposition), modified (implant), or deleted (etch), creating highly accurate 3D structural models .

Applications & Industry Use

SEMulator3D is deployed by leading semiconductor companies for advanced logic nodes (22nm, 14nm, 10nm and beyond), memory technologies including 3D NAND and DRAM, and MEMS device development . It is used for:

• Process development and integration

• Design rule development

• Failure analysis and metrology

• Virtual experimentation (DOE) and sensitivity analysis