VICTORY Process 3D PROCESS SIMULATOR VICTORY Process is a general purpose 3D process simulator. VICTORY Process includes a complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit. Proprietary models, as well as public domain research models, can be easily integrated into VICTORY Process using the open modeling interface. Key Features Sophisticated multi-particle flux models for physical deposition and etching with substrate material redeposition Extremely accurate and fast Monte Carlo implant simulation Comprehensive set of 3D diffusion models: Fermi, three-stream, and five-stream 3D physical oxidation simulation with stress analysis Fast 3D structure prototyping capability enables the in-depth physical analysis of specific processing issues Accurately predicts 3D topology and 3D dopant distribution Automatic meshing and Adaptive Mesh Refinement Efficient multi-threading of time critical operations of Monte Carlo implantation, diffusion, oxidation, and physical etching and deposition Open architecture allows easy introduction and modification of customer specific physical models Seamless link to 3D device simulators including structure mirroring, adaptive doping refinement and electrode specification Silvaco's strong encryption is available to protect valuable customer and third party intellectual property. Core Process Simulator VICTORY Process Core Simulator provides a convenient platform for fast simulation of all important process steps in 3D. Fast Geometrical Etch and Deposition Idealized isotropic etching Idealized conformal deposition Selective etching or complete removal of material regions Idealized full structure or selective material planarization Mask pattern with tilted sidewalls or rounded corners Mask pattern transfer by vertical or dry etching Mask pattern transfer of aerial images Mask polygon definition within the input deck Supports mask feature variations (shrink and expand) Supports GDSII and MaskViews mask formats VICTORY Cell 3D PROCESS SIMULATOR FOR LARGE STRUCTURES VICTORY Cell is a fast, layout-driven 3D process simulator specifically designed for large structures. Simulation speed is derived from careful selection of process models suitable for devices such as CMOS image sensors, TFT arrays, power devices, and other large geometry structures. Key Features Fast 3D process-modeling of etch, deposition, implantation, and diffusion GDSII layout-driven Accurate and fully multi-threaded 3D Monte Carlo implantation Mesh algorithms optimized for large device structures Automated layout-driven mesh generation User-controlled mesh placement Easy to learn and user-friendly SUPREM-like syntax Interface to 3D Device simulators ATLAS 3D and VICTORY Device Silvaco's strong encryption is available to protect valuable customer and third party intellectual property.