Sentaurus Process is an advanced 1D, 2D, and 3D process simulator for developing and optimizing silicon and compound semiconductor process technologies. Created by combining the best-in-class features from Synopsys and former ISE TCAD products, together with a wide range of new features and capabilities, Sentaurus Process is a new-generation process simulator for addressing the challenges found in current and future process technologies. Equipped with a set of advanced process models, which include default parameters calibrated with data from equipment vendors, Sentaurus Process provides a predictive framework for simulating a broad range of technologies from nanoscale CMOS to large-scale high-voltage power devices. Sentaurus Process is part of the comprehensive Synopsys suite of core TCAD products for multidimensional process, device, and system simulations, embedded into a powerful user interface.

Benefits

• Fast prototyping, development, and optimization of a broad range of technologies with comprehensive physics-based process modeling capabilities
• Enhance device performance by optimization of thermal and mechanical stress in process structures with stress history

   

• Provide insights into advanced physical phenomena through self-consistent multidimensional modeling capabilities