MEMS specific layout productivity tools and design verification, 3D model generation and visualization, behavioral model creation and links to 3D analysis packages. Josep Montanyà i Silvestre, CTO at Baolab Microsystems, Terrassa, Spain, says ‘MEMS Pro has been a support for our developments from the very beginning when we started the proof of concept, and it has accelerated our designs allowing us to use a standard IC layout design tool with its DRC capability together with a 3D visualization and a quick connection to standard FEM programs like ANSYS and HFSS.” He added: “MEMS Pro as a tool supporting both IC and MEMS development was a solution natural and easy to implement for us.’ Special features have been integrated into MEMS Pro 5.1 for better interoperability with finite element solvers offering more output formats for 3D geometries, better material properties handling and improved automatic meshing capabilities. The link between 2D layout and 3D modeling has also been improved by automatic translation of curvilinear shapes used in MEMS from polygonized GDSII masks. Finally, MEMS Pro v5.1 has enhanced libraries for system level models including expanded support for mixed electronic/optical devices and a methodology for Design for Manufacturing is illustrated.